Art.DG404 真空ISO接口氣動閥專為真空系統與大口徑真空管路控制需求設計,提供 ISO80、ISO100 規格選擇。搭載義大利原裝進口 OMAL 氣動驅動器,提供快速、穩定且可靠的自動開關控制。閥體採用 SS316 不鏽鋼材質,搭配 Viton / FKM 密封坐墊,具有良好的耐腐蝕性與密封表現,適用於半導體設備、真空製程、真空鍍膜、實驗設備及各類工業真空系統。
| 尺寸 (Size) | ISO80 / ISO100 |
| 接口形式 (Connection) | ISO 真空接口 |
| 閥體材質 (Valve Body) | SS316 不鏽鋼 |
| 密封坐墊 (Seat) | Viton / FKM |
| 適用真空度 (Vacuum Range) | 1x10⁻⁵ Torr ~ 大氣壓 |
| 洩漏率 (Leak Rate) | < 1x10⁻⁹ mbar·l/s |
| 適用溫度 (Operating Temperature) | -20°C ~ 150°C (依密封件而定) |
| 氣缸材質 (Actuator Material) | 陽極處理鋁合金(義大利 OMAL 品牌) |
| 控制方式 (Operation) | 氣動開關控制(雙動/單動常閉) |
| 應用範圍 (Application) | 真空系統、半導體設備、真空鍍膜、實驗設備、工業真空製程 |
The Art.DG404 Vacuum ISO Pneumatic Valve is designed for vacuum systems and large-diameter vacuum piping applications. Available in ISO80 and ISO100 sizes, it is equipped with an original Italian OMAL pneumatic actuator for fast, stable, and reliable automatic on/off operation. The SS316 stainless steel valve body combined with a Viton / FKM seat provides excellent corrosion resistance and sealing performance, making it suitable for semiconductor equipment, vacuum processes, vacuum coating systems, laboratory equipment, and various industrial vacuum applications.
| Size | ISO80 / ISO100 |
| Connection | ISO Vacuum Connection |
| Valve Body | SS316 Stainless Steel |
| Seat | Viton / FKM |
| Vacuum Range | 1x10⁻⁵ Torr ~ Atmospheric Pressure |
| Leak Rate | < 1x10⁻⁹ mbar·l/s |
| Operating Temperature | -20°C ~ 150°C (Depending on seal material) |
| Actuator Material | Anodized Aluminum Alloy (Italian OMAL) |
| Operation | Pneumatic On/Off Control (Double Acting/Single Acting Normally Closed) |
| Application | Vacuum systems, semiconductor equipment, vacuum coating systems, laboratory equipment, industrial vacuum processes |