產品介紹>真空氣動閥|KF控制閥>Art.DG404 真空ISO接口氣動閥|半導體設備適用

Art.DG404 真空ISO接口氣動閥|半導體設備適用

Art.DG404 真空ISO接口氣動閥專為真空系統與大口徑真空管路控制需求設計,提供 ISO80、ISO100 規格選擇。搭載義大利原裝進口 OMAL 氣動驅動器,提供快速、穩定且可靠的自動開關控制。閥體採用 SS316 不鏽鋼材質,搭配 Viton / FKM 密封坐墊,具有良好的耐腐蝕性與密封表現,適用於半導體設備、真空製程、真空鍍膜、實驗設備及各類工業真空系統。

產品特色

  • ISO80 / ISO100 真空接口規格,適用大口徑真空管路
  • 搭載義大利 OMAL 氣動驅動器,作動快速、穩定且耐用
  • SS316 不鏽鋼閥體,具有優異耐腐蝕性
  • Viton / FKM 密封坐墊,提供良好的密封與耐化學性
  • 氣動快速開關控制,適合自動化真空系統
  • 適用真空環境,提供穩定可靠的氣密性能
  • 適用於半導體、真空鍍膜、實驗設備及工業真空製程

技術規格

尺寸 (Size) ISO80 / ISO100
接口形式 (Connection) ISO 真空接口
閥體材質 (Valve Body) SS316 不鏽鋼
密封坐墊 (Seat) Viton / FKM
適用真空度 (Vacuum Range) 1x10⁻⁵ Torr ~ 大氣壓
洩漏率 (Leak Rate) < 1x10⁻⁹ mbar·l/s
適用溫度 (Operating Temperature) -20°C ~ 150°C (依密封件而定)
氣缸材質 (Actuator Material) 陽極處理鋁合金(義大利 OMAL 品牌)
控制方式 (Operation) 氣動開關控制(雙動/單動常閉)
應用範圍 (Application) 真空系統、半導體設備、真空鍍膜、實驗設備、工業真空製程

Art.DG404 Vacuum ISO Pneumatic Valve

The Art.DG404 Vacuum ISO Pneumatic Valve is designed for vacuum systems and large-diameter vacuum piping applications. Available in ISO80 and ISO100 sizes, it is equipped with an original Italian OMAL pneumatic actuator for fast, stable, and reliable automatic on/off operation. The SS316 stainless steel valve body combined with a Viton / FKM seat provides excellent corrosion resistance and sealing performance, making it suitable for semiconductor equipment, vacuum processes, vacuum coating systems, laboratory equipment, and various industrial vacuum applications.

Features

  • Available in ISO80 and ISO100 vacuum connection sizes for large-diameter vacuum piping
  • Italian OMAL pneumatic actuator for fast, stable, and reliable operation
  • SS316 stainless steel valve body for excellent corrosion resistance
  • Viton / FKM seat provides excellent sealing and chemical resistance
  • Fast pneumatic on/off operation for automated vacuum systems
  • Reliable sealing performance for vacuum applications
  • Suitable for semiconductor, vacuum coating, laboratory, and industrial vacuum applications

Technical Specifications

Size ISO80 / ISO100
Connection ISO Vacuum Connection
Valve Body SS316 Stainless Steel
Seat Viton / FKM
Vacuum Range 1x10⁻⁵ Torr ~ Atmospheric Pressure
Leak Rate < 1x10⁻⁹ mbar·l/s
Operating Temperature -20°C ~ 150°C (Depending on seal material)
Actuator Material Anodized Aluminum Alloy (Italian OMAL)
Operation Pneumatic On/Off Control (Double Acting/Single Acting Normally Closed)
Application Vacuum systems, semiconductor equipment, vacuum coating systems, laboratory equipment, industrial vacuum processes
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營業處
11287 台北市文林北路80巷59弄2-3號
電話:(02)2823-7393‧2827-8964
傳真:(02)2823-9978
統一編號:84926912
E-mail :valve2@hangchow.com.tw