company name

Art.DG464M 三通真空NW(KF)氣動閥｜半導體設備適

Art.DG464M三通真空NW(KF)氣動閥，專為真空系統多流向控制設計。採用國際標準NW(KF)/ISO法蘭，搭載高耐腐蝕陽極處理鋁合金氣缸，閥體使用SS316不銹鋼材質，確保卓越的氣密性與超長壽命。適用於半導體、精密電子、化工製程及VOC廢氣處理設備，為高要求產業提供高效、穩定的切換解決方案。

產品特色

• 三通設計，支援L型與T型流向切換
• 超小體積設計，氣密性卓越
• 高精度SS316不銹鋼閥體，耐腐蝕性強
• 陽極處理鋁合金氣缸，輕量耐用
• 適用於VOC廢氣處理、真空系統等多領域
• 坐墊材質Viton (FKM)，耐高溫抗化學腐蝕

技術規格

Art.DG464M Three-Way Vacuum NW(KF) Pneumatic Valve

The Art.DG464M three-way vacuum NW(KF) pneumatic valve is engineered for versatile flow control in vacuum systems. Featuring international standard NW(KF)/ISO flange design, a corrosion-resistant anodized aluminum actuator, and a precision-machined SS316 stainless steel body, it ensures exceptional sealing performance and ultra-long service life. Perfectly suited for semiconductor manufacturing, precision electronics, chemical processes, and VOC exhaust gas treatment applications.

Features

• Three-way design with L-type and T-type flow directions
• Ultra-compact structure with outstanding sealing performance
• High-precision SS316 stainless steel body for superior corrosion resistance
• Anodized aluminum actuator for durability and light weight
• Ideal for VOC treatment systems and advanced vacuum applications
• Viton (FKM) seat for high-temperature and chemical resistance

Technical Specifications