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Art.DG464M 三通真空ISO接口氣動閥

Art.DG464M 三通真空ISO接口氣動閥專為真空系統之多向管路切換與流體控制需求設計，提供 ISO80、ISO100 規格選擇，並可依系統需求搭配 L 型或 T 型流向。搭載義大利原裝進口 OMAL 氣動驅動器，提供快速、穩定且可靠的自動開關控制。閥體採用 SS316 不鏽鋼材質，搭配 PTFE 密封坐墊，具有良好的耐腐蝕性與密封表現，適用於半導體設備、真空製程、真空鍍膜、實驗設備及各類工業真空管路系統。

產品特色

• 三通結構設計，可進行真空管路切換、分流及合流控制
• L 型 / T 型流向選擇，滿足不同管路配置需求
• ISO80 / ISO100 真空接口規格，適用大口徑真空管路
• 搭載義大利 OMAL 氣動驅動器，作動快速、穩定且耐用
• SS316 不鏽鋼閥體，具有優異耐腐蝕性
• PTFE 密封坐墊，提供良好的密封與耐化學性
• 適用真空環境，提供穩定可靠的氣密性能
• 適用於半導體、真空鍍膜、實驗設備及工業真空製程

技術規格

Art.DG464M 3-Way Vacuum ISO Pneumatic Valve

The Art.DG464M 3-Way Vacuum ISO Pneumatic Valve is designed for multi-directional piping switching and flow control in vacuum systems. Available in ISO80 and ISO100 sizes, it can be configured with L-port or T-port flow patterns to meet different piping requirements. Equipped with an original Italian OMAL pneumatic actuator, it provides fast, stable, and reliable automatic operation. The SS316 stainless steel valve body combined with a PTFE seat provides excellent corrosion resistance and sealing performance, making it suitable for semiconductor equipment, vacuum processes, vacuum coating systems, laboratory equipment, and various industrial vacuum applications.

Features

• 3-way design for vacuum line switching, diverting, and mixing applications
• L-port and T-port flow patterns available for different piping configurations
• Available in ISO80 and ISO100 vacuum connection sizes
• Italian OMAL pneumatic actuator for fast, stable, and reliable operation
• SS316 stainless steel valve body for excellent corrosion resistance
• PTFE seat provides excellent sealing and chemical resistance
• Reliable sealing performance for vacuum applications
• Suitable for semiconductor, vacuum coating, laboratory, and industrial vacuum applications

Technical Specifications